Time-of-Flight Secondary Ion Mass Spectrometer
Our time-of-flight secondary ion mass spectrometer is a TOF SIMS IV (ION TOF, Inc.) equipped with a Binx+ liquid metal ion gun. The mass spectrometer is capable of a mass resolution of ~8000 at m/z = 29 in non-imaging mode, and a lateral resolution of ~150 nm at a mass resolution of ~5000 at m/z = 29 in imaging mode. Within the TOF SIMS (analysis) chamber, the sample stage can be cooled to below 140 K and heated to above 600 K, and has five axes of rotation (x, y, z, tilt and rotation). To introduce samples to the vacuum, there is an airlock which is attached to the analysis area via a preparation chamber. In the preparation chamber there is a Knudsen source, a gas doser and a quartz crystal microbalance.
Infrared Spectrometry System
Our infrared spectroscopy (IR) system is based on a Digilab FTS7000 infrared spectrometer and can be used for reflection adsorption infrared spectroscopy (RAIRS) studies for the in-situ investigation of the reactivity of thin films, as well as transmission infrared spectroscopy. The system has a dedicated vacuum chamber which is equipped with a Knudsen source, a gas doser and a quartz crystal microbalance. The sample stage can be cooled to below 140 K and heated to over 600 K, and has four axes rotation (x, y, z and rotation).
Thermionics Dual Source Thermal Evaporator
This is a dedicated, turbo-pumped thermal evaporator for coating Si wafers with gold after depositing a chromium adhesion layer. It is equipped with a quartz crystal microbalance and a Granville-Philips vacuum controller.
Gaertner Scientific Single Angle Stokes Ellipsometer
This is used to evaluate the thickness of self-assembled monolayers and other thin films.